Method and system for laser processing targets of different types on a workpiece

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United States of America Patent

PATENT NO 8541714
SERIAL NO

12793306

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Abstract

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A method and system for laser processing targets of different types on a workpiece are provided. The method includes setting a laser pulse width of one or more laser pulses to selectively provide one or more laser output pulses having one or more set pulse widths based on a first type of target to be processed. The method further includes setting a pulse shape of the one or more output pulses to selectively provide the one or more output pulses having the set pulse shape based on the types of targets to be processed. The method still further includes delivering the one or more output pulses having the one or more set pulse widths and the set pulse shape to at least one target of the first type. The method finally includes resetting the laser pulse width of one or more laser pulses to selectively provide one or more laser output pulses having one or more reset pulse widths based on a second type of target to be processed.

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Patent Owner(s)

Patent OwnerAddress
ELECTRO SCIENTIFIC INDUSTRIES INC13900 NW SCIENCE PARK DRIVE PORLTLAND OR 97229

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gu, Bo North Andover, US 36 801

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