Process for producing an amorphous carbon film
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United States of America Patent
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Sep 24, 2013
Grant Date -
May 14, 2009
app pub date -
Mar 27, 2006
filing date -
Mar 30, 2005
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Abstract
The process for producing an amorphous carbon film of the present invention is a process for producing an amorphous carbon film comprising contacting a surface of a substrate S with bubbles B which have been formed in a liquid L containing an organic compound and inside which plasma has been generated, so as to form an amorphous carbon film on the surface of the substrate S, and the liquid L contains one or more selected from phenols and alcohols having a carbon number of from 1 to 12. According to the present invention, a hard amorphous carbon film can be formed easily.
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