Method for producing of ultra-clean and high-purity electronic grade reagents

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United States of America Patent

PATENT NO 8540960
APP PUB NO 20110094872A1
SERIAL NO

12914716

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Abstract

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A method for producing of ultra-clean and High-purity electronic grade reagents is disclosed. The industrial grade reagents are chemically pretreated and filtered, and the colature is rectified. Heating the steam during the rectification to overheated steam, and filtering the overheated steam used the microporous membrane to remove the solid particulates. Condensing the overheated steam and the secondarily filter to remove the dust in the product. Due to the adoption of the technical scheme, the ultra-clean and High-purity isopropanol produced is in conformity with standard SEMI-C12 and the hydrochloric acid to standard SEMI-C8. And the method is applicable for the large-scale continuous production.

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Patent Owner(s)

Patent OwnerAddress
SHANGHAI CHEMICAL REAGENT RESEARCH INSTITUTE200333 NO 401 NORTH ROAD SHANGHAI PUTUO DISTRICT SHANGHAI CITY SHANGHAI CITY 200333

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huiping, Mao Putuo Shanghai, CN 1 2
Shaoliang, Hui Putuo Shanghai, CN 1 2
Zhan, Jiarong Putuo Shanghai, CN 7 9
Zheyu, Shen Putuo Shanghai, CN 1 2

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