Gigasonic brush for cleaning surfaces

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United States of America Patent

PATENT NO 8539969
APP PUB NO 20120024313A1
SERIAL NO

12847621

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Abstract

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An apparatus, system, and method for a Gigasonic Brush for cleaning surfaces is presented. One embodiment of the system includes an array of acoustic transducers coupled to a substrate where the individual acoustic transducers have sizes in the range of 9 um2 to 250,000 um2. The system may include a positioning mechanism coupled to at least one of a target surface or the array of acoustic transducers, and configured to position the array of acoustic transducers within 1 millimeter of a target surface. The system may also include a cleaning liquid supply arranged to provide cleaning liquid for coupling the array of acoustic transducers to the target surface. The system may further include a controller coupled to the array of acoustic transducers and configured to activate the array of acoustic transducers.

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Patent Owner(s)

Patent OwnerAddress
SEMATECH INC2706 MONTOPOLIS DRIVE AUSTIN TX 78741

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rastegar, Abbas Schenectady, US 20 137

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