Imaging device and method for high-sensitivity optical scanning and integrated circuit therefor
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United States of America Patent
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Sep 17, 2013
Grant Date -
Aug 16, 2012
app pub date -
Jan 17, 2012
filing date -
Jun 22, 2001
priority date (Note) -
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Abstract
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
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