Analysis of an auxiliary leveler additive in an acid copper plating bath

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United States of America Patent

PATENT NO 8535504
APP PUB NO 20110266154A1
SERIAL NO

13065939

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Abstract

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An auxiliary leveler additive that cannot be analyzed by conventional CVS methods for acid copper plating baths is analyzed by cyclic voltammetry at a platinum rotating disk electrode from its effect on the anodic current at very positive potentials.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bratin, Peter Flushing, US 19 230
Pavlov, Michael Fair Lawn, US 16 160
Shalyt, Eugene Washington Township, US 28 175
Tsimberg, Isaak Brooklyn, US 1 7

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