Microscopic total reflection measuring apparatus
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United States of America Patent
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Sep 10, 2013
Grant Date -
Dec 9, 2010
app pub date -
Apr 20, 2010
filing date -
Jun 4, 2009
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Abstract
An object of the present invention is to provide a total reflection measuring apparatus which, while visually observing a specific minute area of a measurement object, is capable of efficiently obtaining optical data on the basis of the total reflection measurement. A microscopic total reflection measuring apparatus of the present invention comprises a Cassegrain mirror 12 having a Cassegrain primary mirror 16 and a Cassegrain secondary mirror 18, which condenses an incident light beam 30 on a measurement object 20 by making an incident light beam successively reflected by the secondary mirror 18 and the primary mirror 16, and which obtains a reflected light beam 32 from the measurement object 20 by making the reflected light beam 32 successively reflected by the primary mirror 16 and the secondary mirror 18. And, a total reflection prism 14 is arranged below the Cassegrain secondary mirror 18. And the incident light beam includes a visible light beam for visual observation and a measurement light beam for acquisition of analysis information, and present invention comprises a visible light filter which separates at least one of the incident light beam to the total reflection prism and the reflected light beam from the total reflection prism 14 into a total reflection area B and a normal reflection area A, and which removes, from the one of the incident light beam and the reflected light beam, the visible light beam in the total reflection area B.
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