Method and apparatus for MEMS oscillator
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 10, 2013
Grant Date -
Feb 9, 2012
app pub date -
Oct 18, 2011
filing date -
Dec 5, 2006
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully