Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application
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United States of America Patent
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Sep 10, 2013
Grant Date -
Mar 11, 2010
app pub date -
Sep 3, 2009
filing date -
Sep 9, 2008
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Abstract
A proposed aerostatic bearing arrangement for moving a device on a base structure, particularly in a vacuum environment, has at least one aerostatic bearing element comprising a bearing body having a load-carrying zone and a suction area. An electrostatic preloading unit having at least one electrode is associated with the at least one aerostatic bearing element, and a voltage can be applied to the electrode in such a way that a force component is generated in direction of the surface normal of the bearing body of the aerostatic bearing element.
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