Method and apparatus for printing periodic patterns
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United States of America Patent
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Sep 3, 2013
Grant Date -
Apr 19, 2012
app pub date -
Feb 25, 2011
filing date -
Oct 13, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
A method for printing a pattern of features including the steps of providing a substrate having a recording layer disposed thereon, providing a mask bearing a periodic pattern of features, arranging the substrate parallel to the mask and with a separation having an initial value, providing an illumination system for illuminating the mask with an intensity of monochromatic light to generate a transmitted light-field for exposing the recording layer, and illuminating the mask for an exposure time while changing the separation by a distance having a desired value and with a rate of change of separation, wherein at least one of the rate of change of separation and the intensity of light are varied during the change of separation, whereby the mask is illuminated by an energy density per incremental change of separation that varies over said distance.
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