Silicon-based antireflective coating compositions
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United States of America Patent
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Sep 3, 2013
Grant Date -
Apr 15, 2010
app pub date -
Feb 25, 2008
filing date -
Feb 27, 2007
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Abstract
A polymer comprising a siloxane polymer having at least one Si—OH group and at least one Si—OR group, where R is condensation stabilizing group optionally having a reactive functional group, wherein the siloxane polymer, when placed into a solvent, has a weight average molecular weight increase of less than or equal to 50% after aging for one week at 40° C. as measured by GPC is provided.
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