Micro-magnetic proximity sensor and method of operating same
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United States of America Patent
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Aug 27, 2013
Grant Date -
Sep 27, 2012
app pub date -
Apr 11, 2012
filing date -
Sep 14, 2009
priority date (Note) -
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Abstract
A micro-machined magnetic relay has a moveable cantilever comprising a soft magnetic material and having a first end and a second end. The cantilever has a rotational axis which is a flexure supported by a substrate. The cantilever has a first state and a second state. A first permanent magnet is disposed near the first end of the cantilever to force the cantilever in the first state. A second movable magnet causes changes of magnetic forces and torques on the cantilever. Therefore, the direction of a sum of torque on the cantilever is reversed. As a result, the cantilever flips from the first state to the second state. The relay can be used as a proximity sensor to detect the motion of an object associated with the second movable magnet.
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