Etch resistant gas sensor

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United States of America Patent

PATENT NO 8519446
APP PUB NO 20090090170A1
SERIAL NO

12333545

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Abstract

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A gas sensor for sensing chemical gases utilizes a metal oxynitride as the sensing material, which changes its conductivity when exposed to the analyte gas. The change in conductivity is measured for the sensor output. The metal may be either tungsten or molybdenum.

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Patent Owner(s)

Patent OwnerAddress
APPLIED NANOTECH HOLDINGS INC3006 LONGHORN BLVD SUITE 107 AUSTIN TX 78758-7631

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dass, Ronald I Austin, US 4 46
Novak, James Austin, US 23 288

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