Time-of-flight mass spectrometry of surfaces
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United States of America Patent
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Aug 27, 2013
Grant Date -
Apr 12, 2012
app pub date -
Dec 16, 2011
filing date -
Jan 25, 2008
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Abstract
The present invent provides a particle detector for counting and measuring the flight time of secondary electrons and scattered ions and neutrals and to correlate coincidences between these and backscattered ions/and neutrals while maintaining a continuous unpulsed microfocused primary ion beam for impinging a surface. Intensities of the primary particle scattering and secondary particle emissions are correlated with the position of impact of the focused beam onto a materials surface so that a spatially resolved surface elemental and electronic structural mapping is obtained by scanning the focused beam across the surface.
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