Production method for optical disc master, optical disc master, stamper, and optical disc
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United States of America Patent
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Aug 27, 2013
Grant Date -
May 13, 2010
app pub date -
Sep 25, 2009
filing date -
Nov 13, 2008
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Abstract
A production method for an optical disc master includes the steps of: preparing a substrate; forming an intermediate layer having a predetermined thickness on the substrate; forming an inorganic resist layer having a thickness on the intermediate layer, a ratio of the thickness of the intermediate layer to the thickness of the inorganic resist layer being in a range between 0.8:1 and 1.5:1; irradiating the inorganic resist layer with a laser beam to selectively expose the inorganic resist layer; and developing the selectively exposed inorganic resist layer.
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