Electrostatic clamp optimizer
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United States of America Patent
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Aug 20, 2013
Grant Date -
Feb 10, 2011
app pub date -
Aug 7, 2010
filing date -
Aug 7, 2009
priority date (Note) -
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Abstract
A system which may be used to control, monitor and optimize an electrostatic clamp is disclosed. In one embodiment of the invention, there is a computer, a control circuit, and at least one amplifier. Also, a signal assessing circuit may be included and used to provide a sensing signal to an output signal of the control circuit. The signal assessing circuit may provide a sensing signal that can be used to monitor the capacitance of the electrostatic clamp. Further, the signal assessing circuit may include circuitry which monitors performance of the electrostatic clamp, and provide performance information to the control circuit.
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