Integrated sensor system
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United States of America Patent
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Aug 20, 2013
Grant Date -
Aug 11, 2011
app pub date -
Dec 23, 2010
filing date -
Dec 31, 2009
priority date (Note) -
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Abstract
An integrated sensory system for a lithography machine with a projection lens system (132) for focusing one or more exposure beams onto a target, a moveable table (134) for carrying the target (9), a capacitive sensing system (300) for making a measurement related to a distance between a final focusing element of the projection lens system (104) and a surface of a target (9), and a control unit (400) for controlling movement of the moveable table (134) to adjust a position of the target (9) based at least in part on a signal from the capacitive sensing system. The capacitive sensing system (300) has a plurality of capacitive sensors (30), each having a thin film structure. The capacitive sensors and the final focusing element (104) of the projection lens system are mounted directly to a common base (112), and the sensors are located in close proximity to an edge of the final focusing element of the projection lens system.
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