Monolithic vacuum manometer utilizing electrostatic interference as a means of detection
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United States of America Patent
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Aug 20, 2013
Grant Date -
May 3, 2012
app pub date -
Jan 9, 2012
filing date -
Jul 1, 2009
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Abstract
A monolithic manometer and method of sensing pressure changes may include sensing a change in parasitic capacitive coupling between multiple parasitic capacitive coupled conductive elements in response to a diaphragm disturbing the parasitic capacitive coupling between the conductive elements. A signal representative of the sensed change in parasitic capacitive coupling may be output.
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