Schottky-like contact and method of fabrication
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United States of America Patent
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Aug 13, 2013
Grant Date -
May 27, 2010
app pub date -
May 19, 2008
filing date -
May 17, 2007
priority date (Note) -
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Abstract
The present invention provides Schottky-like and ohmic contacts comprising metal oxides on zinc oxide substrates and a method of forming such contacts. The metal oxide Schottky-like and ohmic contacts may be formed on zinc oxide substrates using various deposition and lift-off photolithographic techniques. The barrier heights of the metal oxide Schottky-like contacts are significantly higher than those for plain metals and their ideality factors are very close to the image force controlled limit. The contacts may have application in diodes, power electronics, FET transistors and related structures, and in various optoelectronic devices, such as UV photodetectors.
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