Process for purification of monosilane
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United States of America Patent
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Aug 13, 2013
Grant Date -
Aug 4, 2011
app pub date -
Nov 8, 2010
filing date -
Nov 16, 2009
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Abstract
Provided is a method of purifying monosilane. More particularly, the method includes removing impurities from a crude material containing monosilane and ethylene by fractional distillation (operation 1), and removing ethylene and residual impurities by passing the crude material purified in operation 1 through activated carbon (operation 2). According to the method, high-purity monosilane may be more simply and effectively obtained without additional production of byproducts by selectively adsorbing ethylene, which is difficult to separate by fractional distillation, using an activated carbon.
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