System, method and computer program for determining fluid flow rate using a pressure sensor and a thermal mass flow sensor

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United States of America Patent

PATENT NO 8504318
APP PUB NO 20100286931A1
SERIAL NO

12440367

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Abstract

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The present invention relates to a system, method, and computer program product for determining the flow rate of a fluid. The system, method, and computer program product generate a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from the thermal sensor signal (36). The system, method, and computer program product generate a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signal (51a). The system, method, and computer program product generate at least one calibration factor (ψ) using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate. The system, method, and computer program product may generate a calibrated pressure sensor based mass flow rate by using the at least one calibration factor (ψ) to modify the pressure sensor based mass flow rate. The system, method, and computer program product may generate a calibrated thermal sensor based mass flow rate by using the at least one calibration factor (ψ) to modify the thermal sensor based mass flow rate.

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Patent Owner(s)

Patent OwnerAddress
BROOKS INSTRUMENT LLC407 WEST VINE STREET HATFIELD PA 19440

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Berger, Todd Tulsa, US 10 82
Dille, Joseph C Telford, US 22 657
Kehoe, Anthony B Yardley, US 3 64
Mendelson, Jay Hartsdale, US 3 55
Robertson,, III Walter Dennis Harleysville, US 4 86
Whiteley, Jeffrey L Perkasie, US 10 159

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