X-ray topography apparatus
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United States of America Patent
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Aug 6, 2013
Grant Date -
Jul 7, 2011
app pub date -
Jan 3, 2011
filing date -
Jan 6, 2010
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Abstract
An x-ray topography apparatus in which x-rays diffracted from a sample which is scanned with a linear x-ray are detected by an x-ray detector to obtain a planar diffraction image. In this x-ray topography apparatus, the x-ray detector is an imaging plate shaped as a cylinder and provided with a surface area that is larger than the sample, and the imaging plate is made to undergo α-rotation about the center axis of the cylindrical shape in coordination with scanning movement of the linear x-rays. The center axis of the cylindrical shape extends in a direction at a right angle with respect to the direction of the scanning movement of the linear x-rays.
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