Carrier and sputtering device using the same
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United States of America Patent
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Aug 6, 2013
Grant Date -
Mar 3, 2011
app pub date -
Jun 17, 2010
filing date -
Sep 2, 2009
priority date (Note) -
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status (Latency Note)
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Abstract
A carrier for use during sputtering includes a main body and support members. The main body defines a receiving space and includes a lateral surface defining at least one groove extending along a longitudinal direction. The receiving space and the at least one groove communicate with each other. The at least one groove is defined by a first surface and a second surface. The first surface defines recessed portions along the longitudinal direction and communicates with the receiving space. The support members are used for hanging workpieces. Each of the support members includes at least one support arm protruding from the lateral surface and is selectively and movably retained by one of the recessed portions.
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International Classification(s)
- C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
- B23Q:DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TO....
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- C25B:ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE ....
- B25B:TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR,....
- B43L:ARTICLES FOR WRITING OR DRAWING UPON; ACCESSORIES ....
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