Method of fabricating bubble-type micro-pump
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United States of America Patent
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Aug 6, 2013
Grant Date -
Jun 24, 2010
app pub date -
Nov 2, 2009
filing date -
Dec 19, 2008
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Abstract
A manufacturing method of a bubble-type micro-pump is provided. At least a bubble-generating unit is provided on the bubble-generating section. Because of the varied surface energies on the top of the bubble-generating section, the varied backfilling velocities of the fluid of the front end and the rear end cause fluid moving when a bubble vanishes. The top surface of the bubble-generating section is subjected to a particular surface treatment to form a surface energy gradient. Examples of surface treatment include sputtering a thin film with varied densities or thickness, radiating one or multi-layer thin films by a laser beam, etc.
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