Inspection method based on captured image and inspection device

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United States of America Patent

PATENT NO 8497985
APP PUB NO 20100245810A1
SERIAL NO

12738768

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Abstract

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A method of inspection and inspection apparatus able to use a captured image to more precisely inspect the state of film, defect parts, etc. at a surface of an object under inspection are provided.

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Patent Owner(s)

Patent OwnerAddress
SHIBAURA MECHATRONICS CORPORATION5-1 KASAMA 2-CHOME SAKAE-KU YOKOHAMA-SHI KANAGAWA 247-8610

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hayashi, Yoshinori Yokohama, JP 227 5144
Kawamura, Masao Yokohama, JP 48 468
Miyazono, Koichi Yokohama, JP 4 18
Mori, Hideki Yokohama, JP 117 1098
Ono, Yoko Yokohama, JP 35 133
Wakaba, Hiroshi Yokohama, JP 6 25

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