Corrosion-resistant high temperature pressure transducer employing a metal diaphragm
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United States of America Patent
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Jul 30, 2013
Grant Date -
Nov 22, 2012
app pub date -
Aug 6, 2012
filing date -
Jun 15, 2006
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Abstract
A pressure transducer comprising a corrosion resistant metal diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a piezoresistive silicon-on-insulator sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate.
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