Methods and apparatus for ex situ seasoning of electronic device manufacturing process components
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United States of America Patent
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Jul 23, 2013
Grant Date -
Feb 12, 2009
app pub date -
Aug 9, 2008
filing date -
Aug 10, 2007
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Abstract
In one aspect, a method of improving the performance of an electronic device manufacturing facility is provided, including the step of reducing the number of electronic device manufacturing component seasoning steps which are performed using production equipment, whereby the amount of electronic device manufacturing system downtime is reduced. Several other aspects are provided.
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