Flexible substrate tensioner

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8490271
APP PUB NO 20090146355A1
SERIAL NO

11953277

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Abstract

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Apparatus and method to aid in the reproducible and reversible tensioning of flexible substrates, such as polyimide or other file, to ensure planarity before, during, and after processing while mounted in tensioning apparatus.

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Patent Owner(s)

Patent OwnerAddress
UNIVERSAL INSTRUMENTS CORPORATION33 BROOME CORPORATE PARKWAY CONKLIN NY 13748

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Harvilchuck, Laurence A Brackney, US 8 81
Westby, George R Owego, US 3 20

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