Solid state imaging device having high sensitivity and high pixel density
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United States of America Patent
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Jul 16, 2013
Grant Date -
Sep 15, 2011
app pub date -
Mar 11, 2011
filing date -
Mar 12, 2010
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Abstract
Each pixel of a solid state imaging device comprises: a first semiconductor layer; a second semiconductor layer; a third semiconductor layer and fourth semiconductor layer formed on the lateral side of the upper region of the second layer not to be in contact with the top surface of the second semiconductor layer; a gate conductor layer formed on the lower side of the second semiconductor layer; a conductor electrode formed on the side of the fourth semiconductor layer via an insulating film; and a fifth semiconductor layer formed on the top surface of the second semiconductor layer, wherein at least the third semiconductor layer, upper region of the second semiconductor layer, fourth semiconductor layer, and fifth semiconductor layer are formed in the shape of an island. A specific voltage is applied to the conductor electrode to accumulate holes in the surface region of the fourth semiconductor layer.
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