Charged particle collector for a CMOS imager
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United States of America Patent
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Jul 9, 2013
Grant Date -
Jan 19, 2012
app pub date -
Jul 15, 2010
filing date -
Jul 15, 2010
priority date (Note) -
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Abstract
Charged particle sensing devices and methods of forming charged particle sensing devices are provided. The charged particle sensing device includes a source of charged particles, a plurality of collector electrodes for receiving a first portion of the charged particles and a grid formed around and spaced apart from the plurality of collector electrodes. The grid receives a second portion of the charged particles and directs backscattered charged particles, generated responsive to the second portion, to adjacent collector electrodes.
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