Particle-beam microscope
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United States of America Patent
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Jun 25, 2013
Grant Date -
Oct 14, 2010
app pub date -
Apr 8, 2010
filing date -
Apr 8, 2009
priority date (Note) -
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Abstract
A particle beam microscope includes an illumination system generating a particle beam having a ring-shaped conical configuration. A selective detection system is configured to selectively detect one of two groups of particles having traversed the object region. The first group of particles includes the particles that traversed the object region un-scattered or scattered by a small scattering amount. The second group of particles includes particles scattered in the object region by a greater scattering amount.
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