Layer system for the formation of a surface layer on a surface of a substrate and also vaporization source for the manufacture of a layer system
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United States of America Patent
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Jun 25, 2013
Grant Date -
May 21, 2009
app pub date -
Jun 24, 2008
filing date -
Jun 25, 2007
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Abstract
The invention relates to a layer system for the formation of a surface layer on a surface of a substrate, in particular on the surface of a tool, wherein the layer system includes at least one first hard layer of the composition (MoSipAYq)γ(NrCsOt)δ with (o+p+q)=γ, (r+s+t)=δ, and (γ+δ)=100, wherein 40≦γ≦60 and wherein M is at least one metal of the group of the chemical elements consisting of Al and the elements of the secondary groups IVb, Vb, VIb of the periodic system of elements. In accordance with the invention the component AY is at least one element of the group of the chemical elements consisting of Mn, Fe, Co, Ni, Cu and the elements of the secondary group IIIB and the elements of the main group IA, IIA and IIIA and the elements of the group of the lanthanoids of the periodic system of chemical elements, with AY preferably additionally containing boron.
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