High power cathode
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United States of America Patent
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Jun 25, 2013
Grant Date -
N/A
app pub date -
Apr 26, 2006
filing date -
Apr 29, 2005
priority date (Note) -
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Abstract
A magnetron sputtering electrode for use within a magnetron sputtering device that includes a cathode body, a target receiving area defined adjacent the cathode body, a plurality of magnets received within a magnet receiving chamber and an anode shield surrounding the cathode body. At least a portion of a coolant passageway is defined by the anode shield, whereby the coolant passageway is adapted to receive coolant to circulate therethrough thereby cooling the anode shield.
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