Pulsed laser source with high repetition rate
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United States of America Patent
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Jun 18, 2013
Grant Date -
Jan 3, 2013
app pub date -
Jun 30, 2011
filing date -
Jun 30, 2011
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Abstract
Methods and systems for generating pulses of laser radiation at higher repetition rates than those of available excimer lasers are disclosed that use multiple electronic triggers for multiple laser units and arrange the timings of the different triggers with successive delays, each delay being a fraction of the interval between two successive pulses of a single laser unit. Methods and systems for exposing nanoscale patterns using such high-repetition-rate lasers are disclosed.
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