Electron detecting mechanism and charged particle beam system equipped therewith
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United States of America Patent
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Jun 18, 2013
Grant Date -
Sep 27, 2012
app pub date -
Mar 20, 2012
filing date -
Mar 22, 2011
priority date (Note) -
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Abstract
An electron detecting mechanism having a plate provided with an opening permitting passage of the primary beam, an energy filter, a first light detector, and a second light detector. The plate has first and second scintillating surface on its opposite sides. The first scintillating surface faces a sample. The second scintillating surface faces the energy filter. When the primary beam hits the sample, electrons are produced and some of them impinge as first electrons on the first scintillating surface. Consequently, first scintillation light is produced and detected by the first light detector. At the same time, some of the electrons produced from the sample pass through the opening of the plate, are repelled by the energy filter, and impinge as second electrons on the second scintillating surface. As a result, second scintillation light is produced and detected by the second light detector.
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