Substrate storage container
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United States of America Patent
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Jun 18, 2013
Grant Date -
Feb 14, 2013
app pub date -
Apr 20, 2010
filing date -
Apr 20, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
When a lid (20) is attached to a substrate removal/insertion opening (2) in a container body (1), a placement piece forcible displacement means (22) forcibly moves a substrate placement piece (4), which is provided in a region in the vicinity of the substrate removal/insertion opening (2), to a displacement position which does not overlap with a disc-shaped substrate (W). Thus, even if the disc-shaped substrate (W) is increased in diameter, there is no risk of the stored disc-shaped substrate (W) coming into contact with the substrate placement piece (4) due to factors such as vibration or impact, thus the disc-shaped substrate (W) can be stored more safely.
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