ESD protection devices for SOI integrated circuit and manufacturing method thereof

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8461651
APP PUB NO 20120112283A1
SERIAL NO

13002303

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Abstract

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The present invention discloses an ESD protection structure in a SOI CMOS circuitry. The ESD protection structure includes a variety of longitudinal (vertical) PN junction structures having significantly enlarged junction areas for current flow. The resulting devices achieve increased heavy current release capability. Processes of fabricating varieties of the ESD protection longitudinal PN junction are also disclosed. Compatibility of the disclosed fabrication processes with current SOI technology reduces implementation cost and improves the integration robustness.

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Patent Owner(s)

Patent OwnerAddress
SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY CHINESE ACADEMY OF SCIENCES200050 NO 865 CHANGNING ROAD SHANGHAI CHANGNING DISTRICT SHANGHAI CITY SHANGHAI CITY 200050

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Jing Shanghai, CN 545 3366
Cheng, Xinhong Shanghai, CN 8 27
Huang, Xiaolu Shanghai, CN 39 88
Wang, Xi Shanghai, CN 356 3114
Wei, Xing Shanghai, CN 112 674
Zhang, Miao Shanghai, CN 114 550

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