Quartz boat method and apparatus for thin film thermal treatment
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United States of America Patent
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Jun 11, 2013
Grant Date -
Jan 26, 2012
app pub date -
Jun 28, 2011
filing date -
Jul 23, 2010
priority date (Note) -
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Abstract
A method of supporting a plurality of planar substrates in a tube shaped furnace for conducting a thermal treatment process is disclosed. The method uses a boat fixture having a base frame including two length portions and a first width portion, a second width portion, and one or more middle members connected between the two length portions. Additionally, the method includes mounting a removable first grooved rod respectively on the first width portion, the second width portion, and each of the one or more middle members, each first grooved rod having a first plurality of grooves characterized by a first spatial configuration. The method further includes inserting one or two substrates of a plurality of planar substrates into each groove in the boat fixture separated by a distance.
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