Sub-threshold elastic deflection FET sensor for sensing pressure/force, a method and system thereof
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 11, 2013
Grant Date -
Feb 3, 2011
app pub date -
Jun 19, 2008
filing date -
Apr 15, 2008
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention relates to high sensitivity elastic deflection sensors, more particularly related to capacitively coupled FET based elastic deflection sensors. A sub-threshold elastic deflection FET sensor for sensing pressure/force comprises an elastic member forming a moving gate of the sensor, fixed dielectric on substrate of the FET, and a fluid dielectric between the elastic member and the fixed dielectric, wherein alteration in the height of the fluid dielectric (TSENS) due to pressure/force on the elastic member varies the sensor gate capacitance.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully