Measurement of changes in surfaces of objects

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United States of America Patent

PATENT NO 8456644
APP PUB NO 20110051147A1
SERIAL NO

12874570

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Abstract

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Deformations of a surface of a test object can be measured by attaching mirrors to a surface of a test object, each mirror having a reflective surface with a dimension and a radius of curvature smaller than those of the surface of the test object. Light is directed towards the mirrors and a reference surface, and interference patterns are generated using light reflected from the mirrors and the reference surface. Changes in the surface of the test object are determined based on the interference patterns.

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Patent Owner(s)

Patent OwnerAddress
ZYGO CORPORATION21 LAUREL BROOK ROAD MIDDLEFIELD CT 06455

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Badami, Vivek G Higganum, US 7 98
Evans, Christopher J Concord, US 18 147
Filhaber, John East Haddam, US 9 27
Liesener, Jan Middletown, US 21 315

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11.5 Year Payment $7400.00 $3700.00 $1850.00 Dec 4, 2024