Spectrometric process monitoring
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United States of America Patent
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Jun 4, 2013
Grant Date -
Apr 22, 2010
app pub date -
May 5, 2009
filing date -
Dec 21, 2001
priority date (Note) -
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Abstract
Spectrometric apparatus that include an array of detector elements and exhibits a number of capabilities is disclosed. The elements can be responsive to incident radiation to produce an output signal that includes information from the incident radiation. A spectrally selective element can be located in an optical path between the radiation source and the array, with an analysis module responsive to the output signal operative to analyze spatial distribution of spectral information received by the array. The apparatus can also correct for differences in intensity and spectral variability for spectral image signals and/or compare the spectral image signals with a pattern in spatial-spectral coordinate space. Detector elements can be responsive to scattering, and spatial information in their output can be analyzed.
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