Method for depositing hydrogenated diamond-like carbon films using a gas cluster ion beam
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United States of America Patent
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Jun 4, 2013
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Aug 19, 2010
app pub date -
Feb 19, 2009
filing date -
Feb 19, 2009
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Abstract
A method for depositing a hydrogenated diamond-like carbon (H-DLC) film on a surface of a substrate. The method includes maintaining a reduced-pressure environment around a substrate holder for holding a substrate, holding the substrate securely within the reduced-pressure environment, and forming a gas cluster ion beam (GCIB) from a pressurized gas containing hydrocarbon gas and a carrier gas. The method further includes accelerating the GCIB to the reduced-pressure environment, irradiating the accelerated GCIB onto at least a portion of the surface of the substrate, and forming an H-DLC film on the surface.
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