Polycrystalline magnesium oxide (MgO) sintered body and MgO sputtering target
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United States of America Patent
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Jun 4, 2013
Grant Date -
Nov 25, 2010
app pub date -
Jan 27, 2009
filing date -
Jan 28, 2008
priority date (Note) -
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Abstract
The invention provides a polycrystal magnesium oxide (MgO) sintered body which is capable of having a sintered density close to a theoretical density thereof. The MgO sintered body exhibits excellent mechanical properties and heat conductivity, while reducing contamination of an atmosphere due to gas generation. The invention also provides a production method for the sintered body. The polycrystal MgO sintered body has a unique crystalline anisotropy in which (111) faces are oriented along a surface applied with a uniaxial pressure at a high rate. The polycrystalline MgO sintered body is obtained by a method which includes the steps of: sintering an MgO raw material powder, having a particle size of 1 μm or less, under a uniaxial pressure and then subjecting the sintered powder to a heat treatment under an atmosphere containing 0.05 volume % or more of oxygen, at a temperature of 1273 K or more for 1 minute or more.
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International Classification(s)
- C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
- C01B:NON-METALLIC ELEMENTS; COMPOUNDS THEREOF
- C25B:ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE ....
- B28B:SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG O....
- C04B:LIME; MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREO....
- B22F:WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES F....
- C01F:COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUM....
- C22C:ALLOYS
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