Method for making a planar coil
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United States of America Patent
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Jun 4, 2013
Grant Date -
Feb 21, 2013
app pub date -
Oct 15, 2012
filing date -
Oct 7, 2010
priority date (Note) -
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Abstract
A method of making a planar coil is disclosed in the present invention. First, a substrate having a trench is provided. Then, a barrier and a seed layer are formed on the substrate in sequence. An isolative layer is used for guiding a conductive material to flow into a lower portion of the trench such that accumulation of the conductive material at opening of the trench is prevented before the lower portion of the trench is completely filled up, thereby avoiding gap formation in the trench.
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