Particle beam systems and methods

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United States of America Patent

PATENT NO 8450215
APP PUB NO 20110031215A1
SERIAL NO

12806111

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Abstract

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An inspection method comprises

    focusing a particle beam onto a sample;operating at least one detector located close to the sample;assigning detection signals generated by the at least one detector to different intensity intervals;determining, based on the detection signals assigned to the intensity intervals, at least one first signal component related to electrons incident on the detector; anddetermining, based on the detection signals assigned to the intensity intervals, at least one second signal component related to X-rays incident on the detector.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROSCOPY GMBHCARL-ZEISS-PROMENADE 10 JENA 07745

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Albiez, Michael Aalen, DE 17 108
Arnold, Rainer Ulm, DE 14 147
Mantz, Hubert Neu-Ulm, DE 10 66

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