Vacuum gate valve and a method of opening and closing gate using the same
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United States of America Patent
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May 28, 2013
Grant Date -
Dec 30, 2010
app pub date -
Oct 17, 2008
filing date -
Nov 2, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
To reduce invasion and adhesion of foreign matters into and onto the gating-member retreat room in the transition from the gate-open state to the gate-close state including retreat and on-shutting-movement of the gating-member. The shutter, being moved in the shuttering movement room, shuts the entrance aperture by making the shutter sealing contact with the stationary seal by such movement of the shutter itself when the gating-member is accommodated in the gating-member retreat room, and, also being moved in the shuttering movement room, shuts the entrance aperture by making the shutter sealing contact with the second gate seal by such movement of the shutter itself when the gating-member, being moved in the shuttering movement room, shuts the exhaust port by making the first gate seal contact with the stationary seal by such movement of the gating-member itself.
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