Linearly polarized light imaging method and device
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United States of America Patent
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May 21, 2013
Grant Date -
Jan 7, 2010
app pub date -
Dec 18, 2007
filing date -
Dec 30, 2006
priority date (Note) -
Expired
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Abstract
A device includes an incident arm, a detection arm, a sample stage, and an image processing computer. The incident arm includes a light source and a first polarizing element, and is disposed on one side of the sample stage. The detection arm includes a second polarizing element and a photoelectric detector, and is disposed on a light-detection path. The photoelectric detector is connected to the computer. The device further includes a device for adjusting polarization angles of the first and second polarizing elements. A method includes: illuminating a sample surface using linearly polarized light with a certain polarization angle; detecting outgoing polarized light by a photoelectric detector; adjusting polarization angles of the incident and detected polarized light, and repeating the above two steps to obtain a series of polarized images, each image corresponding to incident and detected polarization angles; and computer processing the obtained images to obtain sample information.
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