Method and structure for characterising an atomic force microscopy tip
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United States of America Patent
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May 14, 2013
Grant Date -
Apr 21, 2011
app pub date -
Oct 18, 2010
filing date -
Oct 19, 2009
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Abstract
A method for characterizing an atomic force microscopy tip using a characterization structure having two inclined sidewalls opposite one another and of which at least one actual lateral distance separating the two inclined sidewalls corresponding to a given height is known, the method including scanning the surfaces of the inclined sidewalls by the tip, the scanning being carried out while the tip oscillates solely vertically; measuring, for the given height, the lateral distance separating the two inclined sidewalls, the measurement incorporating the convolution of the shape of the tip with the shape of the characterization structure; and determining a characteristic dimension of the tip as a function of the measured lateral distance, and of the actual lateral distance.
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