Alignment calculation

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United States of America Patent

PATENT NO 8440475
APP PUB NO 20100030360A1
SERIAL NO

12184798

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Abstract

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Alignment data from an exposure tool suitable for exposing a plurality of semiconductor wafers are provided, the alignment data including alignment values applied by the exposure tool to respective ones of the plurality of semiconductor wafers at a plurality of measured positions.

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Patent Owner(s)

Patent OwnerAddress
POLARIS INNOVATIONS LIMITED29 EARLSFORT TERRACE DUBLIN 2 DUBLIN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Habets, Boris Dresden, DE 13 92
Henke, Wolfgang Radebeul, DE 10 89
Kupers, Michiel Dresden, DE 13 79

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