Fabrication process of a biosensor on a semiconductor substrate
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United States of America Patent
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May 14, 2013
Grant Date -
Jun 16, 2011
app pub date -
Dec 16, 2010
filing date -
Jun 27, 2008
priority date (Note) -
Expired
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Abstract
The disclosure relates to a fabrication process of a biosensor on a semiconductor wafer, comprising steps of: making a central photosensitive zone comprising at least one pixel-type biological analysis device comprising a photosensitive layer, and a first peripheral zone surrounding the central photosensitive zone, comprising electronic circuits. The first peripheral zone is covered by a hydrophilic coating, and the central photosensitive zone is covered with a hydrophobic coating. A barrier of a bio-compatible resin is formed on the second peripheral zone.
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